Discharging silicon splitters from a cleaning bath for polysilicon, comprises e.g. separating a cleaning medium and the splitters using a filter, washing the filter and removing the splitter from the filter, removing the cleaning medium

摘要

Discharging silicon splitters from a cleaning bath for polysilicon, comprises separating a cleaning medium and the splitters using a filter, washing the filter and removing the splitter from the filter, removing the cleaning medium from the cleaning bath, and rinsing the cleaning bath and removing the splinter from the cleaning bath.