Pressure sensor dynamics mems, in particular for applications in the embodiment of the microphones

摘要

The present invention relates to a pressure sensor of the mems type and / or "nems " including: - at least a first deformable cavity (20) to receive the pressure variations of ambient atmosphere, this first deformable cavity being carried out in a first substrate and comprising at least one movable or deformable wall (25), disposed at least in part in the plane parallel to the first substrate, said plane of the sensor, and means (21) in order to transmit to the cavity of the pressure variations of ambient atmosphere, - of the detection means (24, 24 ′) in order to detect a movement or deformation, in the plane of the sensor, said movable or deformable wall, under the effect of a pressure variation of the ambient atmosphere.