METHOD FOR MANUFACTURING DROPPING-IN JIG, METHOD FOR HIGH-PRECISION COAT DRYING OF FUNCTIONAL MATERIAL, VACUUM DEPOSITION METHOD, AND METHOD FOR MANUFACTURING HIGH-FUNCTIONALIZED SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for high-precision coat drying of a high-functional material of high throughput that can shorten a vacuum standby time.;SOLUTION: A method for high-precision coat drying of a high-functional material comprises: the step of dropping an organic substrate in a dropping-in section of a dropping-in jig of a jig tool having a dropping-in jig consisting of stack of a dropping-in substrate which has a dropping-in part for guiding the organic substrate on which a function material is to be applied and dried to be dropped in, and an adhesive holding layer that holds a levelness of the dropped-in organic substrate, and has a recess or a through hole to make a projection fit thereto, and a base jig that has a projection to be fit to the recess or the through hole provided in the dropping-in jig, and mounting to fix the dropping-in jig, causing the organic substrate to be adhered to an adhesive holding layer located at the dropping-in part, and applying the function material to the organic substrate to dry the function material; the step of removing the dropping-in jig from the base jig tool afterwards; the step of peeling the adhesive holding layer of the dropping-in jig; and the step of removing the organic substrate from the adhesive holding layer.;COPYRIGHT: (C)2014,JPO&INPIT