ELECTRET ELECTRODE, VIBRATION POWER GENERATING UNIT AND VIBRATION POWER GENERATING DEVICE USING THE SAME, COMMUNICATION DEVICE EQUIPPED WITH VIBRATION POWER GENERATING DEVICE, AND ELECTRET ELECTRODE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electret electrode including an electret holding a lot of electric charges, and further provide an electrostatic induction type vibration power generating unit having higher energy conversion efficiency than the prior art does by using the electret electrode according to the invention.;SOLUTION: An electret electrode includes: a substrate; a plurality of first conductive films arranged in parallel to one main surface of the substrate; a plurality of second conductive films formed on the one main surface of the substrate and in a region where the plurality of first conductive films are not formed; an electret formed on each of the plurality of first conductive films; and an insulation film formed on each of the plurality of second conductive films. The first conductive films and the second conductive films are arranged alternately, and the plurality of second conductive films are connected in series with each other. The electret electrode is characterized by further including a source terminal and a drain terminal for applying current to the plurality of second conductive films arranged in series.;COPYRIGHT: (C)2014,JPO&INPIT