FOCUSED ION BEAM APPARATUS, SAMPLE CROSS SECTION OBSERVATION METHOD USING THE SAME, AND COMPUTER PROGRAM FOR SAMPLE CROSS SECTION OBSERVATION USING FOCUSED ION BEAM

摘要

PROBLEM TO BE SOLVED: To provide a focused ion beam apparatus capable of acquiring a region showing specific composition inside a sample in a short time.SOLUTION: A focused ion beam apparatus 100 includes: a focused ion beam irradiation mechanism 20 for forming a first cross section 2s and a plurality of second cross sections 2c1 to 2c4 in a sample 2; first image generation means 90A for generating reflection electron images or secondary electron images of the first cross section and second cross sections as first images Gs, and G1 to G4; second image generation means 90B for generating EDS images or secondary ion images of the first cross section and second cross section as second images Hs and H4; and a control unit 90 for causing the second image generation means to generate the second image of the second cross section, when the first image of the second cross section includes a region differing from a region N showing specific composition in the first image of the first cross section in the case of acquiring the first and second images of the first cross section and the first image of the second cross section.