FASTENING STRUCTURE, SUBSTRATE PROCESSING DEVICE USING FASTENING STRUCTURE, AND WASHER-ADDED FASTENED MEMBER USED FOR FASTENING STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a fastening structure and the like capable of improving sealability between a base material and a fastened member, and making difficult to detach a washer and facilitating handling of the washer when the fastened member is detached from the base material.;SOLUTION: A fastening structure 101 according to the present invention includes: a bolt 1; a base material 2 provided with a female screw 21 engageable with a bolt 1; and a fastened member 3 provided with a through-hole 31 into which the bolt 1 can be inserted. The fastened member 3 is fastened to the base material 2 by inserting the bolt 1 into the through-hole 31 and engaging the bolt 1 with the female screw 21. A counterbore portion 32 having a circular outer edge is formed on a surface of the fastened member 3 facing the base material 2. The fastening structure further includes a flexible washer 4 into which the bolt 1 can be inserted and that is strongly fitted into the counterbore portion 32. The washer 4 is compressed in a thickness direction in a state in which the fastened member 3 is fastened to the base material 2.;COPYRIGHT: (C)2014,JPO&INPIT