MANUFACTURING METHOD OF STRUCTURE HAVING MICRO-IRREGULARITIES AND STRUCTURE HAVING MICRO-IRREGULARITIES MANUFACTURED BY THE SAME

摘要

PROBLEM TO BE SOLVED: To form a pattern having irregularities including protrusions having step structure, with high degree of freedom in design.;SOLUTION: The step processing is performed using an object 10 to be processed on a surface of which a pattern 11 having micro-irregularities is formed. The step processing includes: a thin film formation step of forming, on the surface where the pattern 11 having irregularities is formed, a thin film 12 having a film thickness thinner than a depth of a recessed part 11b of the pattern 11 having irregularities; an etching step of performing etching on the surface in a condition where material of the thin film 12 is more difficult to be etched than material of the object 10 to be processed; and a removal step of removing the thin film 12.;COPYRIGHT: (C)2014,JPO&INPIT