ELECTROMAGNETIC FIELD ANALYSIS, WAVE OPTICAL CALCULATION PROGRAM, AND APPARATUS USING ELECTROMAGNETIC FIELD ANALYSIS AND WAVE OPTICAL CALCULATION PROGRAM

摘要

PROBLEM TO BE SOLVED: To perform electromagnetic field calculation in and outside a semiconductor and electrical characteristic calculation in the semiconductor integrally without discrepancy when the charge conservation law is not established.;SOLUTION: An electromagnetic field analysis or a wave optical calculation program is created by using as a basic model the relationship in which when defining a scalar quantity equal to a value obtained by adding divergence of a vector potential to a value obtained by dividing the time differential of a potential by square of light velocity, a current density vector is equal to a value obtained by subtracting a value obtained by dividing gradient of the scalar quantity by magnetic permeability, from a value obtained by subtracting a value obtained by multiplying the time differential of an electric field vector by a dielectric constant from the rotation of a magnetic field vector, a charge density is equal to the sum of a value obtained by multiplying divergence of the electric field vector by the dielectric constant and a value obtained by multiplying the time differential of the scalar quantity by the dielectric constant, and a rate of charge generation and extinction is equal to a value obtained by dividing, by the magnetic permeability, a value obtained by subtracting Laplacian from a value obtained by dividing second order partial differential of the scalar quantity with respect to time by the square of light velocity.;COPYRIGHT: (C)2014,JPO&INPIT