Brayton cycle low-temperature steam cryopump of gas equilibrium equation

摘要

The main invention is to cool the water vapor cryopump using the Brayton cycle gas cooler of the equilibrium equation . The cooler includes a compressor , a reciprocating engine of a gas equilibrium type , and a counter flow heat exchanger . It is connected to the cryopump through the transmission line being separated . And gas storage volume as an additional possible choices , with adjustable valve the pressure in the system , institutions and variable speed , bypassing the institutions , and the gas line between the cryo panel and compressor , a heat exchanger and a , and a gas line bypassing . Heating and rapid cooling are possible and can be heated and cooled rapidly cryopanel without heating the engine , the system can reduce the input power by reducing the thermal load on the cryopanel .