SUPERLATTICE STRUCTURE, SEMICONDUCTOR DEVICE AND SEMICONDUCTOR LIGHT EMITTING DEVICE INCLUDING THE SUPERLATTICE STRUCTURE, AND METHOD OF MAKING THE SUPERLATTICE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a superlattice structure in which quantum-dot layers, even highly stacked, in quantum-dot nanowires are kept uniform in size, and a quantum-dot layer size between the quantum-dot nanowires also varies little.;SOLUTION: A superlattice structure includes a plurality of quantum-dot nanowires extending in a substantially vertical direction from a plane region. The quantum-dot nanowires have a structure of barrier layers and quantum-dot layers alternately stacked on the plane region. The quantum-dot nanowires are substantially the same in diameter in a stacking direction and substantially uniformly arranged at an area density of 4 nanowires/μm² or more.;COPYRIGHT: (C)2014,JPO&INPIT