PERIODIC PATTERN INSPECTION DEVICE, AND PERIODIC PATTERN INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a periodic pattern inspection device and a periodic pattern inspection method for detecting defects of unevenness of an inspection target body having a periodic pattern with high sensitivity and high accuracy.;SOLUTION: A periodic pattern inspection device takes a substrate having a periodic pattern formed on the substrate surface as an inspection target, irradiates the substrate with illumination light, photographs diffraction light generated from the periodic pattern, and inspects the photographed image through information processing. An information processing unit that performs the information processing includes a normal pattern diffraction intensity calculation unit, a variation pattern diffraction intensity calculation unit, and an irradiation angle calculation unit.;COPYRIGHT: (C)2014,JPO&INPIT