DEVICE FOR MEASURING TRANSMITTANCE OF ULTRAVIOLET TRANSMITTING WINDOW AND METHOD FOR CONTROLLING ULTRAVIOLET IRRADIATION AMOUNT

摘要

PROBLEM TO BE SOLVED: To provide a device for measuring transmittance of an ultraviolet transmitting window capable of measuring transmittance in an actual processing environment of a synthetic quartz transmitting window which transmits ultraviolet light.;SOLUTION: A device for measuring transmittance of an ultraviolet transmitting window comprises: a tray 24 on which an ultraviolet transmitting window 10 is placed in a housing container 21; a heating unit 22 which is provided in the housing container 21 and heats the ultraviolet transmitting window 10; an illuminance measuring unit 23 which is provided in the housing container 21 and measures illuminance of the ultraviolet transmitting through the ultraviolet transmitting window 10 heated by the heating unit 22; means for relatively moving the ultraviolet transmitting window 10 on the tray 24 and the heating unit 22 so as not to thermally influence the illuminance measuring unit 23 when the illuminance is measured by the illuminance measuring unit 23; temperature measuring means for measuring a temperature of the ultraviolet transmitting window 10 when the illuminance is measured by the illuminance measuring unit 23; an inert gas supply mechanism 26 which supplies an inert gas into the housing container 21; an exhaust mechanism 27 which exhausts the inside of the housing container 21; and an oxygen concentration measuring unit 29 which measures an oxygen concentration in the housing container 21.;COPYRIGHT: (C)2014,JPO&INPIT