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The framework body for large-sized perikuru, being formed by the production methodological abbreviation rectangular condition of large-sized perikuru and

机译:大型Perikuru的骨架,由大型Perikuru的生产方法缩写矩形条件和

摘要

PROBLEM TO BE SOLVED: To suppress reduction of an exposure effective area while securing manufacturing easiness of a frame body.SOLUTION: Each of bent parts 10a, 10b bent outward is formed in a part of each of long sides 2a, 2b configuring a large pellicle frame body 2 which is formed in a substantially rectangular shape and is adapted to stretch and support a large pellicle film 3. In this way, the bent parts 10a, 10b can be formed by a simple method of bending the part of each of the long sides 2a, 2b, and even when sides of the large pellicle frame body 2 are bent inward due to tension of the stretched large pellicle film 3, a maximum displacement amount of the sides of the large pellicle frame body 2 to enter inward can be reduced. Therefore, reduction of an exposure effective area can be suppressed while securing manufacturing easiness.
机译:解决的问题:在确保框架主体的制造容易性的同时,抑制曝光有效面积的减小。解决方案:在构成大的防护膜的长边2a,2b的一部分上形成有向外侧弯曲的弯曲部10a,10b。框体2形成为大致矩形形状,并适于拉伸和支撑大的防护薄膜3。这样,可以通过使长条的各部分弯曲的简单方法形成弯曲部10a,10b。侧面2a,2b,并且即使大薄膜框架2的侧面由于拉伸的大薄膜膜3的张力而向内弯曲,也可以减小大薄膜框架2的侧面向内进入的最大位移量。 。因此,在确保制造容易性的同时,可以抑制曝光有效面积的减小。

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