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The framework body for large-sized perikuru, being formed by the production methodological abbreviation rectangular condition of large-sized perikuru and
The framework body for large-sized perikuru, being formed by the production methodological abbreviation rectangular condition of large-sized perikuru and
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机译:大型Perikuru的骨架,由大型Perikuru的生产方法缩写矩形条件和
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摘要
PROBLEM TO BE SOLVED: To suppress reduction of an exposure effective area while securing manufacturing easiness of a frame body.SOLUTION: Each of bent parts 10a, 10b bent outward is formed in a part of each of long sides 2a, 2b configuring a large pellicle frame body 2 which is formed in a substantially rectangular shape and is adapted to stretch and support a large pellicle film 3. In this way, the bent parts 10a, 10b can be formed by a simple method of bending the part of each of the long sides 2a, 2b, and even when sides of the large pellicle frame body 2 are bent inward due to tension of the stretched large pellicle film 3, a maximum displacement amount of the sides of the large pellicle frame body 2 to enter inward can be reduced. Therefore, reduction of an exposure effective area can be suppressed while securing manufacturing easiness.
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