Measuring device of measurement methods and surface charge distribution of the surface charge distribution

摘要

PROBLEM TO BE SOLVED: To obtain a measuring method of surface charge distribution and a measuring device of surface charge distribution capable of measuring potential distribution in a short period of time with micron order high resolution by properly correcting the distortion of a scanning area and the depth of potential associated with the condition of potential.;SOLUTION: The surface charge distribution of a sample is measured by scanning with a charged particle beam by applying a known electrode potential to the back surface of the sample having the surface charge distribution. The measuring method of the surface charge distribution includes: a step of performing processing to convert the known electrode potential to apparent charge density by using the geometrical arrangement by the structure model of conductors and dielectric bodies in an object space to be analyzed and unknown charge density on the sample as the boundary condition; a step of calculating electron orbital simulation calculation data by determining the space electric field using the apparent charge density; and a step of determining the charge density on the sample by checking these calculated data with the measured detection signal data to measure the surface charge distribution.;COPYRIGHT: (C)2011,JPO&INPIT