Gas floating transport for the swirling flow body and gas floating conveying device

摘要

It is possible to avoid the transported material from coming into contact with the swirling flow in the body and substrate transport process of the present invention relates transported object, to prevent scratched on the transported object. Spout 14a of the first through-hole 11 of circular cross section which penetrates the rear surface of [SOLUTION] surface, causing a swirling flow by jetting the fluid from the inner peripheral surface of the through hole 11, and 14b, the flat portion 18 swirling flow body 1 and a spout 16a~16d second for jetting fluid upward from. Even if the spout 14a of the first, the buoyancy generated by the swirling flow from 14b is insufficient, it is possible to levitate the auxiliary glass 3 by the upward flow from the spout 16a~16d second. Therefore, even in a state where the edge of the glass 3 overlaps the part of the swirl flow forming member 1 in the transport process of the glass 3, and avoiding the edge of the glass 3 from contacting with the swirling flow structure 1 I could. [Selection] Figure Figure 1