Synthesis and Characterization of First Row Transition Metal Complexes Containing alpha-keto Hydrazonate Ligands as Potential Precursors for Use in Metal Film Deposition

摘要

A compound that is useful for forming a metal by reaction with a reducing agent is described by formula (I):; ;whereinM is a metal selected from Groups 3 through 12 of the Periodic Table;R¹ and R² are each independently H or C₁-C₆ alkyl; andR³ is H or C₁-C₈. alkyl.