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RESONANT MEMS LORENTZ-FORCE MAGNETOMETER USING FORCE-FEEDBACK AND FREQUENCY-LOCKED COIL EXCITATION
RESONANT MEMS LORENTZ-FORCE MAGNETOMETER USING FORCE-FEEDBACK AND FREQUENCY-LOCKED COIL EXCITATION
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机译:利用力反馈和频率锁定线圈激励的谐振MEMS洛伦兹力磁度计
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摘要
A method includes supplying a current to at least one conductive path integral with a MEMS device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field. The method includes determining the magnetic field based on a control value in a control loop configured to maintain a constrained range of motion of the MEMS device. The control loop may be configured to maintain the MEMS device in a stationary position. The current may have a frequency equal to a resonant frequency of the MEMS device.
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