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NONINVASIVE MEASURING DEVICE AND NONINVASIVE MEASURING METHOD FOR PROBING AN INTERFACE
NONINVASIVE MEASURING DEVICE AND NONINVASIVE MEASURING METHOD FOR PROBING AN INTERFACE
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机译:探测界面的非侵入式测量设备和非侵入式测量方法
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摘要
The present disclosure provides solutions to probing an interface. With a noninvasive measuring device provided in one embodiment of the disclosure, an acoustic wave whose frequency is higher than approximately 300 GHz is generated to propagate in a buffering film. With measuring the reflection from the interface of an object to be measured interfacing with the buffering film, it is possible in one embodiment of the disclosure that at least one physical property of the interface may be analyzed, preferably with approximately 0.3 nm resolution.
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