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NONINVASIVE MEASURING DEVICE AND NONINVASIVE MEASURING METHOD FOR PROBING AN INTERFACE

机译:探测界面的非侵入式测量设备和非侵入式测量方法

摘要

The present disclosure provides solutions to probing an interface. With a noninvasive measuring device provided in one embodiment of the disclosure, an acoustic wave whose frequency is higher than approximately 300 GHz is generated to propagate in a buffering film. With measuring the reflection from the interface of an object to be measured interfacing with the buffering film, it is possible in one embodiment of the disclosure that at least one physical property of the interface may be analyzed, preferably with approximately 0.3 nm resolution.
机译:本公开提供用于探测接口的解决方案。利用在本公开的一个实施例中提供的非侵入性测量设备,产生频率高于大约300GHz的声波以在缓冲膜中传播。通过测量来自与缓冲膜对接的待测物体的界面的反射,在本发明的一种实施方式中,可以分析界面的至少一种物理性质,优选地具有大约0.3nm的分辨率。

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