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Nanopatterns by phase separation of patterned mixed polymer monolayers
Nanopatterns by phase separation of patterned mixed polymer monolayers
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机译:通过图案分离的混合聚合物单层的相分离形成纳米图案
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摘要
Micron-size and sub-micron-size patterns on a substrate can direct the self-assembly of surface-bonded mixed polymer brushes to create nanoscale patterns in the phase-separated mixed polymer brush. The larger scale features, or patterns, can be defined by a variety of lithographic techniques, as well as other physical and chemical processes including but not limited to etching, grinding, and polishing. The polymer brushes preferably comprise vinyl polymers, such as polystyrene and poly(methyl methacrylate).
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