METHOD FOR OPERATING A PULSED ARC VAPORIZER SOURCE AS WELL AS A VACUUM PROCESS INSTALLATION WITH PULSED ARC VAPORIZATION SOURCE

摘要

The invention relates to a vacuum process system for surface-treating workpieces (3) using an arc evaporation source (5). Said system comprises a firstelectrode (5') connected to a DC power source (13) and a second electrode (3,18, 20), disposed separately from the arc evaporation source (5). The twoelectrodes (5', 3, 18, 20) are operated while being connected to a singlepulsed power supply (16).