首页> 外国专利> METHOD AND SYSTEM FOR IN-LINE REAL-TIME MEASUREMENTS OF LAYERS OF MULTILAYERED FRONT CONTACTS OF PHOTOVOLTAIC DEVICES AND CALCULATION OF OPTO-ELECTRONIC PROPERTIES AND LAYER THICKNESSES THEREOF

METHOD AND SYSTEM FOR IN-LINE REAL-TIME MEASUREMENTS OF LAYERS OF MULTILAYERED FRONT CONTACTS OF PHOTOVOLTAIC DEVICES AND CALCULATION OF OPTO-ELECTRONIC PROPERTIES AND LAYER THICKNESSES THEREOF

机译:光电器件多层前接触层的在线实时测量及其光电性能和层厚度的计算方法和系统

摘要

A method and system for real-time, in-line calculations of opto-electronic properties and thickness of the layers of multi-layered transparent conductive oxide stacks of photovoltaic devices is provided. The method and system include taking measurements of each layer of the stack during deposition thereof. The measurements are then used to calculate the opto-electronic properties and thicknesses of the layers in real-time.
机译:提供了一种用于光伏器件的多层透明导电氧化物堆叠的光电特性和层的厚度的实时,在线计算的方法和系统。该方法和系统包括在堆叠的沉积期间对堆叠的每一层进行测量。然后,将这些测量值用于实时计算光电特性和各层的厚度。

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