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METHOD AND SYSTEM FOR IN-LINE REAL-TIME MEASUREMENTS OF LAYERS OF MULTILAYERED FRONT CONTACTS OF PHOTOVOLTAIC DEVICES AND CALCULATION OF OPTO-ELECTRONIC PROPERTIES AND LAYER THICKNESSES THEREOF
METHOD AND SYSTEM FOR IN-LINE REAL-TIME MEASUREMENTS OF LAYERS OF MULTILAYERED FRONT CONTACTS OF PHOTOVOLTAIC DEVICES AND CALCULATION OF OPTO-ELECTRONIC PROPERTIES AND LAYER THICKNESSES THEREOF
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机译:光电器件多层前接触层的在线实时测量及其光电性能和层厚度的计算方法和系统
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摘要
A method and system for real-time, in-line calculations of opto-electronic properties and thickness of the layers of multi-layered transparent conductive oxide stacks of photovoltaic devices is provided. The method and system include taking measurements of each layer of the stack during deposition thereof. The measurements are then used to calculate the opto-electronic properties and thicknesses of the layers in real-time.
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