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Autofocusing method using fluorescence of pre-two-photon absorption region for two-photon photopolymerization nanofabrication system
Autofocusing method using fluorescence of pre-two-photon absorption region for two-photon photopolymerization nanofabrication system
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机译:双光子光聚合纳米制造系统中利用双光子前吸收区荧光的自动聚焦方法
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摘要
The present invention relates to an autofocusing method for a two-photon photopolymerization nanofabrication system, which comprises the following: a laser source outputting ultrashort pulse laser beam capable of causing Twophoton Absorption Phenomenon in an autofocusing system for a two-photon photopolymerization nanofabrication system using fluorescence of pre-two-photon absorption region; a Galvano shutter converting a laser beam route extended; a mirror converting the route by reflecting laser beam outputted by the laser source; an object lens for forming focus for reflected light reflected from the mirror; a substrate part including two-photon photopolymerization resin on the sub strate for forming a micro/nano-structure; a stage for transporting the substrate to X, Y and Z axis; a CCD camera extracting fluorescence force created in the resin on the substrate; and a control computer automatically controlling the location of the stage for moving the substrate to a searched location by searching the focus location automatically using fluorescence force extracted by the CCD camera.
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