ON-SITE RECYCLING METHOD AND APPARATUS FOR THE HIGH EFFICIENT RECOVERY OF WASTE GENERATION FROM GLASS ETCHING PROCESS AND RECYCLING LIQUID USING THEREOF AND METHOD FOR TREATING SLUDGE

摘要

The present invention relates to a recycling method for waste fluid generated in a glass etching process of a flat panel display, a smart phone, a touch panel, a solar cell and the like comprising: a step of filtering sludge among waste fluid by using a filter; a step of removing metal ions among the waste fluid by diffusion dialysis and ion exchange; a step of removing excessive water generated in recycling the waste fluid by performing distillation with a distiller; and a step of controlling a composition ratio by adding lost components after recycling the waste fluid, to a recycling fluid manufactured thereby and a recycling apparatus. The present invention enables installation in an etching process site, enables modulation and consecutive operation and is able to sharply reduce the consumption of an etching liquid and environment treatment costs. Additionally, the present invention provides a treating method for sludge by extracting solid among sludge components filtered in the filtering step by using salt filtering or electricity filtering. The treating method is able to reduce the load of the environment treatment equipment of field by removing environmental hazard metal components among filtered sludge in advance. [Reference numerals] (AA) Waste fluid tank; (BB) Etching process; (CC) Filter; (DD) Sludge; (EE) Pure water storage tank; (FF) Waste mixed acid storage tank; (GG,QQ) Storage tanke; (HH) Solid extraction; (II) Liquid balance tank; (JJ) Diffusion dialysis device; (KK) Flash vaporization; (LL) Waste water; (MM) Collected mixed acid; (NN) Distributor; (OO) Ion exchange resin column; (PP) Second ion exchange resin column