FRAME ACCUMULATION SCANNING METHOD FOR ENERGY DISPERSIVE X-RAY FLUORESCENCE SPECTROMETER

摘要

Disclosed is a frame accumulation scanning method for an energy dispersive X-ray fluorescence spectrometer. The disclosed frame accumulation scanning method for an energy dispersive X-ray fluorescence spectrometer is to analyze elements, which are contained in a specimen, by collecting fluorescence X-rays emitted from the specimen after irradiating electron beams emitted from an electron gun, and comprises: a step of setting an interest area to be analyzed; a step of dividing the interest area into multiple detail areas; a step of setting the sizes of spots, to which the electron beams are irradiated, in response to the sizes of the detail areas; a step of setting beam irradiation time to be shorter than time, in which the deformation of the specimen is generated by the electron beams, depending on the intensity of the electron beams, the sizes of the detail areas, and the kind of the specimen; a step of measuring spectra by collecting the fluorescence X-rays after respectively irradiating the electron beams to the detail areas for the beam irradiation time, and then storing the spectra to be accumulated on previously measured spectra; and a step of repetitively performing a step of determining the spectra, which are stored to be accumulated, to be analyzable, and then storing the spectra, which are stored to be accumulated, to be accumulated on the previously measured spectra for the respective detail areas until the spectra, which are stored to be accumulated, are determined to be analyzable when determined to be unanalyzable.