Air Cleaning Apparatus using Ozone and Catalyst Material for VOCs Removal

摘要

PURPOSE: An exhaust gas disposal system of an organic exhaust line is provided to remove volatile organic compound emitted through the organic exhaust line which is installed in industrial field and rooftop of semiconductor workplace. CONSTITUTION: An exhaust gas disposal system of an organic exhaust line comprises a volatile organic compound inlet port (12); an ozone injecting hole (13); a medicine filter (18) positioned at the upper part of the ozone injecting hole; and an air outlet. The volatile organic compound inlet port is connected to the organic exhaust line. The ozone injecting hole is formed at one lateral side of the volatile organic compound inlet port. The medicine for decomposing ozonide generated in the reaction with ozone, ozone remained after the reaction with ozone, and remaining volatile organic compound is filled in a medicine filter. Ozone injected into the ozone injecting hole is supplied from an ozone generating apparatus which is separately installed to a pipe.