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Method for electrical testing of wafer, involves readjusting relative positions of test contacts and counter contacts of electrical tester to each other depending on result of renewed relative position determination
Method for electrical testing of wafer, involves readjusting relative positions of test contacts and counter contacts of electrical tester to each other depending on result of renewed relative position determination
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机译:晶片电测试的方法,包括根据重新确定相对位置的结果重新调整电测试仪的测试触点和反触点的相对位置
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摘要
The method involves determining relative positions of test contacts (11) and counter contacts (22) of an electrical tester (1) to each other. The relative positions of the test contacts and the counter contacts are aligned to each other for executing touch contact. Electrical testing of the taking place touch contact is executed for a testing duration. The relative positions are determined again during the testing duration. The relative positions are readjusted depending on result of the renewed relative position determination. An independent claim is also included for an electrical tester comprising test contacts and counter contacts.
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