Method for characterization of aluminum oxide layers on work sample, involves measuring Raman spectrum of alumina-layer, determining comparison value of measured Raman spectrum with reference value, and assigning comparison value

摘要

Method for the characterization of aluminum oxide layers on work sample from aluminum or its alloys, involves defining spectral region(s) having at least one characteristic Raman active vibrational mode for structure and/or type of alumina layers, measuring Raman spectrum of alumina-layer on work sample, determining intensity value of characteristic Raman active vibrational mode, determining comparison value of measured Raman spectrum with reference value, and assigning comparison value of structure and/or type of studied alumina layer and/or progress of formation of alumina-layer. Method for the characterization of aluminum oxide layers on work sample from aluminum or its alloys, involves defining spectral region(s) having at least one characteristic Raman active vibrational mode for structure and/or type of alumina layers, measuring Raman spectrum formed of alumina-layer on work sample, determining the intensity value of at least one characteristic Raman active vibrational mode of the measured Raman spectrum, determining at least comparison value by comparing the intensity value of at least one characteristic Raman active vibrational mode of the measured Raman spectrum with at least one intensity reference value, and assigning at least one comparison value of structure and/or type of studied alumina layer and/or the progress of the formation of alumina-layer. Independent claims are included for the following: (1) Raman spectrometer; (2) computer program product; (3) computer program with program code unit; (4) quality assurance system; and (5) usage of Raman spectrometer.