A method of making a hybrid carbon nanotube graphene hybrid thin film, hybrid nanotube graphene thin film, and field effect transistor therewith

摘要

A method of forming a cleaned nanotube graphene hybrid thin film, comprising: depositing a nanotube thin film over a substrate to form a nanotube thin film layer; Removing impurities from a surface of the layer of the nanotube thin film that does not contact the substrate to produce a cleaned layer of a nanotube thin film; Depositing a layer of graphene over the cleaned layer of the nanotube thin film to produce a nanotube graphene hybrid thin film; and removing impurities from a surface of the nanotube-graphene hybrid thin film to produce a cleaned nanotube graphene hybrid thin film, the hybrid thin film having improved electrical performance by reducing the resistance of the nanotubes by reducing the contact area through the use of Graphene is enlarged as a bridge.