MEMS Acoustic Converter, MEMS Microphone, MEMS Micro Speaker, Speaker Array, and Method of Making an Acoustic Converter

摘要

A MEMS acoustic transducer includes a substrate through which a cavity passes and a conductive backplane assembly with a plurality of conductive perforated backplane portions that extend across the substrate cavity. A dielectric spacer disposed on a backplane unit between adjacent conductive perforated backplane portions and one or more graphene membrane (s) are carried by the dielectric spacer and extend over the conductive perforated backplane portions.