Method for manufacturing e.g. gas field ion source for producing helium ions of e.g. gold, used in field ion microscope, involves generating electric field in intermittent and repeated manner such that Taylor cone is formed in end area

摘要

The method involves providing a point (9) including an end area including a refractory material core covered with a molten metal layer. An electric field is generated in an intermittent and repeated manner such that a Taylor cone is formed in the end area. The end area is cooled below temperature of liquefaction of metal by maintaining the electric field. An ionized species condensed on a surface of the layer is emitted by applying potential difference between an extractor (15) and the point.