首页> 外国专利> THERMAL STIMULATION CURRENT MEASURING DEVICE, THERMAL STIMULATION CURRENT MEASURING PROGRAM, AND THERMAL STIMULATION CURRENT MEASURING METHOD

THERMAL STIMULATION CURRENT MEASURING DEVICE, THERMAL STIMULATION CURRENT MEASURING PROGRAM, AND THERMAL STIMULATION CURRENT MEASURING METHOD

机译:热刺激电流测量装置,热刺激电流测量程序和热刺激电流测量方法

摘要

PROBLEM TO BE SOLVED: To obtain a measurement condition suitable for a sample as measuring object easily and quickly, and to perform an appropriate TSC measurement according to the obtained measurement condition.;SOLUTION: A thermal stimulation current measuring device for performing thermal stimulation current measurement to a sample 11 as measuring object includes: condition extraction means 45 for obtaining a measurement condition required for performing thermal stimulation current measurement to the sample 11; condition registration means 46 for registering the measurement condition obtained by the condition extraction means 45 in a predetermined data storage area 44; and measurement performing means 41 for performing thermal stimulation current measurement to the sample 11 while using the measurement condition registered in the data storage area 44 by the condition registration means 46.;COPYRIGHT: (C)2015,JPO&INPIT
机译:解决的问题:容易且快速地获得适合于作为测量对象的样品的测量条件,并根据获得的测量条件进行适当的TSC测量。作为测量对象的样品11包括:条件提取装置45,用于获取对样品11进行热刺激电流测量所需的测量条件;条件登记装置46,用于将由条件提取装置45获得的测定条件登记在规定的数据存储区域44中。测量执行装置41,用于在利用条件记录装置46在数据存储区域44中记录的测量条件的同时,对样品11进行热刺激电流测量。COPYRIGHT:(C)2015,JPO&INPIT

著录项

  • 公开/公告号JP2015028463A

    专利类型

  • 公开/公告日2015-02-12

    原文格式PDF

  • 申请/专利权人 RIGAKU CORP;

    申请/专利号JP20140045295

  • 发明设计人 HIRAYAMA YASUO;

    申请日2014-03-07

  • 分类号G01N25/00;H01L21/66;

  • 国家 JP

  • 入库时间 2022-08-21 15:34:23

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