PEELING METHOD, PROGRAM, COMPUTER STORAGE MEDIUM, PEELING DEVICE, AND PEELING SYSTEM

摘要

PROBLEM TO BE SOLVED: To efficiently perform processing of peeling a support substrate from a processed substrate.;SOLUTION: A peeling method includes: a step A205 of disposing a first holding part at a predetermined height position after a step A203 of position adjustment of a superposed substrate on the first holding part; a step A206 of disposing a sharp member at a predetermined height position; a succeeding step A207 of making the sharp member be in contact with a side surface on one end side of the superposed substrate to detect contact of the sharp member; a succeeding step A208 of a peeling induction part forming a peeling start part from which a support substrate is peeled from a processed substrate, on the side surface on the one end side of the superposed substrate; and a succeeding step A213 of sucking the support substrate of the superposed substrate, and peeling the support substrate from the processed substrate in a direction from the one end side to the another end side from the peeling start part as a start point by using a plurality of suction movement parts for moving the support substrate in a direction of making the support substrate separate from the processed substrate.;COPYRIGHT: (C)2015,JPO&INPIT