PEELING METHOD, PROGRAM, COMPUTER STORAGE MEDIUM, PEELING DEVICE AND PEELING SYSTEM

摘要

PROBLEM TO BE SOLVED: To perform peeling of a processed substrate and a support substrate efficiently.;SOLUTION: By means of a plurality of suction moving parts of a second holding section, a support substrate is peeled from a processed substrate, from one end side toward the other end side of a superposed substrate (step A213). Subsequently, an inspecting section images a first substrate entirely, and inspects presence or absence of the processed substrate in a first holding section (step A215). Thereafter, while rotating the first holding section by a rotating mechanism, the inspecting section images the outer periphery of the processed substrate, and inspects the state on the outer periphery of the processed substrate (step A216).;COPYRIGHT: (C)2016,JPO&INPIT