PHOTODETECTION VIBRATOR, LIGHT WAVELENGTH MEASUREMENT DEVICE, LIGHT WAVELENGTH MEASUREMENT METHOD, AND METHOD OF MANUFACTURING PHOTODETECTION VIBRATOR MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a photodetection vibrator for achieving a high-accuracy measurement of a light wavelength inexpensively, to provide a manufacturing method thereof, and to provide a light wavelength measurement device employing the photodetection vibrator.;SOLUTION: A photodetection vibrator 1 is configured of: a micro-mechanical vibrator 2 made of DLC (diamond-like carbon); a nanoperiodic structure 3 disposed on the micro-mechanical vibrator 2 and whose heat absorption rate with respect to a desired light wavelength has wavelength dependency; and a support part 4 made of Si. When the photodetection vibrator 1 is irradiated with light, an abnormal light transmission phenomenon due to surface Plasmon resonance is induced in the nanoperiodic structure 3, and a stress change occurs in the micro-mechanical vibrator 2 in response to the light wavelength dependency of the heat absorption rate of the nanoperiodic structure 3 and a change in the vibration characteristic of the micro-mechanical vibrator 2 occurs. A wavelength of light irradiated to the photodetection vibrator 1 is obtained based on this change in the vibration characteristic.;COPYRIGHT: (C)2015,JPO&INPIT