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Spectroscopic measurement method, scattering-type near-field microscope, and method for manufacturing tip-enhanced Raman probe

机译:光谱测量方法,散射型近场显微镜和尖端增强拉曼探针的制造方法

摘要

PROBLEM TO BE SOLVED: To provide a spectrometry and a scattering type near field optical microscope which have a high enhancement degree, and a manufacturing method for a tip-enhanced raman probe with a high enhancement degree.;SOLUTION: A manufacturing method for a tip-enhanced raman probe includes the step of: preparing a silicon probe; oxidizing the probe; and forming a metal film on the oxidized probe. In the step of oxidizing the probe, the silicon is oxidized until getting a thickness where a plasmon resonance wavelength of the probe on which the metal film is formed and a wavelength of a pump laser become equal.;COPYRIGHT: (C)2013,JPO&INPIT
机译:解决的问题:提供具有高增强度的光谱仪和散射型近场光学显微镜,以及具有高增强度的尖端增强型拉曼探针的制造方法。解决方案:尖端的制造方法-增强拉曼探针包括以下步骤:准备硅探针;氧化探针在氧化探针上形成金属膜。在氧化探针的步骤中,硅被氧化直至厚度达到一定厚度,在该厚度上形成金属膜的探针的等离子体激元共振波长与泵浦激光器的波长相等。;版权所有:(C)2013,JPO&INPIT

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