laser integrated modulator module including an optical element, modulator module including an optical element, an optical element and, method for manufacturing an optical element

摘要

PROBLEM TO BE SOLVED: To solve the problem that in an optical element for modulating light, a mesa is easily chipped and parasitic capacitance of an electrode pad is large.;SOLUTION: The optical element comprises: a ridge-like optical waveguide part; mesa protector parts arranged side by side in the optical waveguide part; resin parts covering the upper parts of the mesa protector parts and arranged on the both sides of the mesa protector parts; an electrode arranged on the optical waveguide part; an electrode pad arranged on the resin part positioned on the opposite side of the optical waveguide part with respect to the mesa protector part; and a connection part arranged on the resin part and electrically connecting the electrode pad to the electrode.;COPYRIGHT: (C)2013,JPO&INPIT