SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS FOR SWITCHABLE MULTI PERSPECTIVE DETECTOR, AND METHOD OF OPERATING SWITCHABLE MULTI PERSPECTIVE DETECTOR

摘要

PROBLEM TO BE SOLVED: To improve detection of a signal beam by a secondary charged particle detection device specifically used in a scanning electron microscope.SOLUTION: A secondary charged particle detection device for detecting a signal beam includes: a detector structure (220) having at least two detection elements (222) with active detection areas, the detection elements being separated from each other; and a particle optics (200) configured for separating the signal beam into a first portion and at least one second portion, and also configured for focusing the first portion and the at least one second portion. The particle optics includes: an aperture plate (201); and at least a first aperture opening (202) provided in the aperture plate, and at least one second aperture opening (204) provided in the aperture plate. The first aperture opening has a concave shaped portion, and particularly the first aperture opening has a pincushion shape.