suspension substrate, method of manufacturing a substrate for suspension, suspension, suspension and hard disk drive with element

摘要

PROBLEM TO BE SOLVED: To provide a substrate for a suspension which has high degree of installation freedom of a via.;SOLUTION: In the substrate for the suspension, according to the present invention, which includes a metal support substrate, a base insulating layer formed on the metal support substrate, and conductor layers formed on the base insulating layer, the base insulating layer has through holes for vias having a taper angle within a range of 45° to 85°, the conductor layers have wiring layers for vias which are formed so as to surround the periphery of the through holes for the vias in a plan view and have outer diameters within a range of 40 μm to 122 μm, and connection wiring layers connected to the wiring layers for the vias, and have vias which fill the inside of the through holes for the vias and are formed of a conductive material for connecting the metal support substrate and the wiring layers for the vias.;COPYRIGHT: (C)2012,JPO&INPIT