METHOD OF EVALUATING POLYCRYSTAL SILICON GRAIN SIZE, METHOD OF SELECTING POLYCRYSTAL SILICON ROD, POLYCRYSTAL SILICON ROD, POLYCRYSTAL SILICON LUMP, AND METHOD OF MANUFACTURING SINGLE CRYSTAL SILICON

摘要

PROBLEM TO BE SOLVED: To provide a technique which contributes the stable production of a single crystal silicon by selecting a polycrystal silicon suitable for a production raw material for the single crystal silicon in high quantitativity and reproducibility.;SOLUTION: When evaluating a grain size of a polycrystal silicon by an X-ray diffraction method, a value (ΔB/P_ave) is used as an evaluation index of the grain size of the polycrystal silicon by the steps of: placing a sampled tabular specimen 20 at a position where Bragg reflection from a Miller index plane hkl is detected; rotating the tabular specimen 20 in a plane around the center of the tabular specimen 20 as a rotation center by a rotation angle of φ so that an X-ray irradiation region defined by a slit φ-scans on a principal surface of the tabular specimen 20; obtaining a chart indicating rotation angle (φ) dependency of a Bragg reflection intensity of the tabular specimen 20 from the Miller index plane hkl; obtaining a difference (ΔB) between a maximum value (B_max) and a minimum value (B_min) of a diffraction intensity value of a base line from the chart; and dividing ΔB by a mean value (P_ave) of the diffraction intensity values.;COPYRIGHT: (C)2015,JPO&INPIT