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Spatial light modulation element manufacturing method, spatial light modulation element, spatial light modulator, and exposure apparatus
Spatial light modulation element manufacturing method, spatial light modulation element, spatial light modulator, and exposure apparatus
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机译:空间光调制元件的制造方法,空间光调制元件,空间光调制器以及曝光装置
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摘要
A spatial light modulation element formed on a substrate, a flat portion movable with respect to the substrate, a flat plate attached to the flat portion, and a surface of the flat plate opposite to the attachment surface, and reflects incident light. And a dielectric film. In the spatial light modulation element, the dielectric film may include two or more dielectric layers that are stacked on each other and have a refractive index different from that of an adjacent layer. In the spatial light modulator, the dielectric film may be formed by alternately laminating Al 2 O 3 films and SiO 2 films.
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机译:空间光调制元件形成在基板上,相对于基板可移动的平坦部分,附接到该平坦部分的平板以及该平板的与附接表面相反的表面,并且反射入射光。和介电膜。在空间光调制元件中,介电膜可以包括彼此堆叠的两个或更多个介电层,并且具有与相邻层不同的折射率。在空间光调制器中,介电膜可以通过交替层叠Al 2 Sub> O 3 Sub>膜和SiO 2 Sub>膜而形成。
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