Micro and manufacturing method and apparatus for producing a three-dimensional structure of the nano- scale

摘要

By the device and 3-dimensional milling method, [solve problems of the present invention is to provide a three-dimensional structure of the micrometer or nanometer scale. [MEANS FOR SOLVING PROBLEMS] The apparatus includes a (12) ion column that generates a beam milling samples are fixed to the apparatus base (20) on. In order to produce a residence time ion beam and / or different, pattern computer (22) controls the ion column (12) or to form a multiple Miringupasu. To create a 3-dimensional structure, a subsequent pass is at least partially overlapping the previous pass. If necessary, SEM column (14) may be provided. [Selection Figure Figure 2