Substrate transport path candidate determining device, the substrate transport path candidate determination method, a substrate processing system, program, recording medium

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of enhancing the efficiency of substrate processing while enabling the execution of substrate processing at a proper conveyance path.;SOLUTION: A plurality of lines Lb, Lf are arranged, wherein a plurality of substrate processors 100, 200(m), 300 arranged in substrate conveyance directions Db, Df execute processing of a substrate while conveying the substrate in the substrate conveyance directions Db, Df. Substrate conveyance paths can be switched by transferring the substrate between different lines Lb, Lf, and a plurality of ways of a conveyance processing pattern for performing conveyance processing in parallel can be executed to each of the plurality of conveyance paths with the substrate processor 100 as a conveyance start point in the respective different lines Lb, Lf. Then, a proper selection conveyance processing pattern can be selected from the plurality of ways of the conveyance processing pattern, substrate conveyance processing is performed according to the selection conveyance processing pattern, and the substrate is conveyed to each of the plurality of conveyance paths with the substrate processor 100 as a conveyance start point in the respective different lines Lb, Lf so that conveyance processing for processing can be performed to the substrate in parallel.;COPYRIGHT: (C)2014,JPO&INPIT