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SUBSTRATE DAMAGE DETECTION DEVICE, SUBSTRATE TRANSFER ROBOT WITH SUBSTRATE DAMAGE DETECTION DEVICE, AND SUBSTRATE DAMAGE DETECTION METHOD
SUBSTRATE DAMAGE DETECTION DEVICE, SUBSTRATE TRANSFER ROBOT WITH SUBSTRATE DAMAGE DETECTION DEVICE, AND SUBSTRATE DAMAGE DETECTION METHOD
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机译:基板破损检测装置,具有基板破损检测装置的基板破损机器人以及基板破损检测方法
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摘要
A substrate damage detection device is configured to be mounted to a substrate transfer robot provided with a slidably-movable substrate support. The substrate damage detection device includes an image obtainer and a damage detector. The image obtainer, such as a camera, is configured to obtain an image of the periphery of a substrate placed on the substrate support of the transfer robot. The damage detector is configured to detect damage made to the substrate by using the image of the periphery obtained by the image obtainer.
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