首页> 外国专利> Device and process for producing poly-crystalline or multi-crystalline silicon; ingot as well as wafer of poly-crystalline or multi-crystalline silicon produced thereby, and use for the manufacture of solar cells

Device and process for producing poly-crystalline or multi-crystalline silicon; ingot as well as wafer of poly-crystalline or multi-crystalline silicon produced thereby, and use for the manufacture of solar cells

机译:用于生产多晶硅或多晶硅的设备和工艺;所生产的多晶硅或多晶硅的晶锭以及晶片,并用于制造太阳能电池

摘要

A process and a device for producing crystalline silicon, particularly poly- or multi-crystalline silicon are described, wherein a melt of a silicon starting material is formed and the silicon melt is subsequently solidified in a directed orientation. A phase or a material is provided in gaseous, fluid or solid form above the melt in such a manner, that a concentration of a foreign atom selected from oxygen, carbon and nitrogen in the silicon melt and thus in the solidified crystalline silicon is controllable, and/or that a partial pressure of a gaseous component in a gas phase above the silicon melt is adjustable and/or controllable, the gaseous component being selected from oxygen gas, carbon gas and nitrogen gas and gaseous species containing at least one element selected from oxygen, carbon and nitrogen. The formation of impurity compound precipitations or inclusions, in particular of silicon carbide affecting electric properties of solar cells, can be effectively inhibited and prevented according to the present invention.
机译:描述了一种用于生产晶体硅,特别是多晶硅或多晶硅的方法和设备,其中形成了硅原料的熔体并且随后将硅熔体在定向的方向上固化。以一种气态,液态或固态形式在熔体上方提供一种相或一种材料,使得可控制硅熔体中因而固化的结晶硅中选自氧,碳和氮的外来原子的浓度,和/或在硅熔体上方的气相中的气态组分的分压是可调节和/或可控制的,该气态组分选自氧气,碳气和氮气以及包含至少一种选自以下元素的气态物质:氧,碳和氮。根据本发明,可以有效地抑制和防止杂质化合物沉淀或夹杂物的形成,特别是影响太阳能电池电性能的碳化硅的形成。

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