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Method of forming zinc oxide prominence and depression structure and method of manufacturing solar cell using thereof

机译:形成氧化锌凹凸结构的方法和使用其制造太阳能电池的方法

摘要

A method of forming a nanometer-scale prominence and depression structure on a zinc oxide thin film in a wet-etching method, and the method includes the steps of: preparing a substrate; forming a nano structure having a height and a width of a nanometer range; forming the zinc oxide thin film on the substrate on which the nano structure is formed; and wet-etching the zinc oxide thin film, in which in the wet-etching step, zinc oxide having relatively low physical compactness is preferentially etched since the zinc oxide is positioned on the nano structure, and thus the prominence and depression structure is formed around the nano structure by the etching.;The method is effective in that a thin film can be uniformly formed on the prominence and depression structure, and an electrolyte or an organic material may uniformly penetrate between the prominence and depression structure.
机译:一种通过湿蚀刻法在氧化锌薄膜上形成纳米级的凹凸结构的方法,该方法包括以下步骤:准备基板;形成具有纳米范围的高度和宽度的纳米结构;在其上形成有纳米结构的基板上形成氧化锌薄膜;湿蚀刻氧化锌薄膜,其中在湿蚀刻步骤中,由于氧化锌位于纳米结构上,因此优先蚀刻了物理压实度相对较低的氧化锌,从而在其周围形成了凹凸结构该方法是有效的,因为可以在凸起和凹陷结构上均匀地形成薄膜,并且电解质或有机材料可以均匀地渗透在凸起和凹陷结构之间。

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