MULTI-PLUME PULSED LASER DEPOSITION SYSTEM FOR HIGH-THROUGHPUT FABRICATION OF DIVERSE MATERIALS

摘要

A multi-plume pulsed laser deposition (MPPLD) system has been provided for fabrication of an array of diverse materials in predefined regions on a substrate. In one embodiment, the method comprises splitting a high power laser beam into multiple laser beams, split laser beams being focused onto target materials, multiple plumes being generated on the surfaces of target materials, deposition of ablated target materials non-uniformly on a substrate covered with a mask, and heating the substrate during deposition.