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The manufacturing process of a device for analysis of fluid flow in the soil, device for analysis of fluid flow in the soil, method and system for analysis of fluid flow in the soil

机译:用于分析土壤中的流体的设备的制造过程,用于分析土壤中的流体的设备,用于分析土壤中的流体的方法和系统

摘要

The manufacturing process of a device for analysis of fluid flow in the soil, device for analysis of fluid flow in the soil, method and system for analysis of fluid flow in soil.The present invention is in the field of engineering, geology and sanitation, specifically referring to the manufacturing process of a device for analysis of fluid flow in the soil, a device for analysis of fluid flow in the soil, a method and a system using it.These teachings to their decontamination, and can be used also in the oil industry, with the aim of evaluating different technologies to increase the efficiency in the extraction.It is provided by the present invention is a manufacturing process of a device for simulation of fluid flow in the soil, which comprises the steps of: (a) applying a layer of photoresist material (2) on a silicon wafer (1); (b) transferring a desired pattern to The photoresist material (2),Where a channel is obtained in high relief (3); (c) formation of channels (5) in low relief, in a training material channels (4); (d) the manufacture of holes in the training material channel (4) and encapsulation of the channels (5).There is also a device for simulation of fluid flow in the soil, manufactured by the process as defined above, as well as a method and a system for simulation of fluid flow in the soil containing the device defined above
机译:用于分析土壤中流体流动的设备的制造过程,用于分析土壤中流体流动的设备,用于分析土壤中流体流动的方法和系统。本发明属于工程,地质和卫生领域,具体来说,是指用于分析土壤中流体流动的设备,用于分析土壤中流体流动的设备,使用该方法的系统和系统的制造工艺。发明内容本发明提供了一种用于模拟土壤中流体流动的装置的制造过程,其包括以下步骤:在硅晶片(1)上施加一层光刻胶材料(2); (b)将所需的图案转印到光刻胶材料(2)上,在该光刻胶材料上获得高浮雕(3)的通道; (c)在培训材料通道(4)中以低浮雕形式形成通道(5); (d)在训练材料通道(4)中制造孔并密封通道(5)。还有一种通过上述方法制造的用于模拟土壤中流体流动的装置,以及包含上述装置的土壤中流体流动模拟的方法和系统

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