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Method for obtaining platform for testing chemical substances by the technique of surface strengthened Raman spectroscopy and platform obtained by this method

机译:利用表面增强拉曼光谱技术获得化学物质检测平台的方法及该方法获得的平台

摘要

the subject of the invention is a way to receive platform research chemicals enhanced surface raman spectroscopy technique, containing surface layer of highly extensive acting zinc oxide surface on a silicon substrate and covered with a layer of an embedding gold, characterized by that,the first pre preparing silicon substrate; subsequently, such substrate is subjected to a deposition (so-called atomic layers.ald method), where, as a result of the chemical exchange reaction process occurs the deposition layers of zinc oxide, which operates in a cyclical manner, with the use of oxygen zinc precursor and gas remaining liquid, whereby the thickness of layers is determined number of ald cycles.resulting in an silicon substrate coated with a layer of zinc oxide with well developed morphology surface, such that the standard deviation of surface roughness (ang. root mean square rms) exceeds the value of 60 nm, after which the so obtained substrate silicon coated with a layer of zinc oxide is inscribed gold pvd method (ang.physical vapor deposition physical deposition from the gaseous phase). in addition, the invention includes a platform so obtained.
机译:本发明的主题是一种接收平台研究化学品增强的表面拉曼光谱技术的方法,该方法包括在硅基板上包含高度扩展的作用氧化锌表面的表面层,并覆盖一层嵌入的金,其特征在于,准备硅衬底;随后,对这种基材进行沉积(所谓的原子层法),其中,由于发生了化学交换反应过程,氧化锌的沉积层以循环的方式运行,并使用氧锌前驱体和气体剩余的液体,从而确定层的厚度,并确定醛循环的数量。结果是,硅基板上涂覆了一层氧化锌,表面形态发达,因此表面粗糙度的标准偏差(根)均方根值(rms)超过60 nm的值,之后将如此获得的涂有一层氧化锌的衬底硅刻写为金pvd方法(从气相物理气相沉积物理沉积)。另外,本发明包括这样获得的平台。

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