SCATTERED-LIGHT-INFORMATION PROCESSING METHOD, SCATTERED-LIGHT-INFORMATION PROCESSING DEVICE, AND SCATTERED-LIGHT-INFORMATION PROCESSING SYSTEM

摘要

This scattered-light-information processing method includes the following steps: a scattered-light-measurement-information acquisition step in which information regarding the intensity distribution of scattered light resulting from the scattering of light shone at a prescribed angle is acquired; a model generation step (step S202) in which a target-object model is generated from the geometry and optical properties of a target object, namely a transmissive optical element (300), and conditions under which the intensity distribution of the aforementioned scattered light was measured; a function-parameter setting step (step S203) in which, in the target-object model, a parameter for a function that represents information regarding output-side scattered light that has passed through the target object, at least, is set; a scattered-light-intensity-distribution computation step in which a scattered-light-intensity-distribution calculation result is computed on the basis of the target-object model; and function-parameter-computation processing steps (steps S204 through S207) in which the aforementioned function parameter is computed such that the scattered-light-intensity-distribution calculation result computed on the basis of the target-object model matches the scattered-light-intensity-distribution information acquired in the scattered-light-measurement-information acquisition step.