首页> 外国专利> CATALYTIC SYNTHESIS METHOD OF HIGH QUALITY HEXAGONAL BORON NITRIDE FROM BORAZINE OLIGOMER PRECURSORS AND HIGH QUALITY HEXAGONAL BORON NITRIDE OF THE SAME

CATALYTIC SYNTHESIS METHOD OF HIGH QUALITY HEXAGONAL BORON NITRIDE FROM BORAZINE OLIGOMER PRECURSORS AND HIGH QUALITY HEXAGONAL BORON NITRIDE OF THE SAME

机译:硼氮烷低聚物前体和该品的高质量六角硼氮化物的催化合成高质量六价硼氮化物的催化方法

摘要

The present invention relates to a high quality boron nitride film grown by a metallic catalyst effect by using borazine polymers as precursors which enables high quality high crystalline hexagonal boron nitride film to be easily synthesized by manufacturing a boron nitride precursor solution by melting borazine polymers in a solvent and performing annealing after coating an upper layer or a lower layer of a metallic catalyst layer with the same, and to a manufacturing method thereof. The present invention is capable of conveniently synthesizing a high quality hexagonal boron nitride film at low costs by solving problems such as gas precursor control, vapor pressure control and the like which are the problems of an existing CVD method, is capable of coating various structures and materials with the hexagonal boron nitride film, is capable of selectively coating a desired area and is conveniently applied to the coating of composite materials and various materials by being easily large-scaled.
机译:本发明涉及通过使用硼嗪聚合物作为前体通过金属催化剂作用而生长的高质量氮化硼膜,其使得通过将硼嗪聚合物在玻璃中熔融而制造氮化硼前体溶液,可以容易地合成高质量的高结晶六方晶氮化硼膜。溶剂,并在其上涂覆金属催化剂层的上层或下层之后进行退火,及其制造方法。本发明能够通过解决诸如气体前驱体控制,蒸气压控制等现有CVD方法所存在的问题,从而以低成本方便地合成高质量的六方氮化硼膜,能够涂覆各种结构,并且具有六方氮化硼膜的材料能够选择性地涂覆期望的区域,并且由于易于大规模生产,因此可以方便地应用于复合材料和各种材料的涂层。

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